Atomic Layer Deposition for Semiconductors
- Type:
- Other > E-books
- Files:
- 1
- Size:
- 6.43 MiB (6745185 Bytes)
- Texted language(s):
- English
- Tag(s):
- science engineering
- Uploaded:
- 2016-04-24 15:12:05 GMT
- By:
-
clouderone
- Seeders:
- 0
- Leechers:
- 1
- Comments
- 0
- Info Hash: CCB99C0C0B92F4856B0CB72175E05E51E1CAB3A8
(Problems with magnets links are fixed by upgrading your torrent client!)
Atomic Layer Deposition for Semiconductors - Cheol Seong Hwang, Cha Young Yoo (Springer, 2014).pdf ISBN 978-1-4614-8053-2 Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device
| Atomic Layer Deposition for Semiconductors - Cheol Seong Hwang, Cha Young Yoo (Springer, 2014).pdf | 6.43 MiB |
